Entegris, Inc. engages in the development, manufacture, and supply of specialty materials for the microelectronics industry. It operates through the Materials Solutions (MS) and Advanced Purity Solutions (APS) segments. The Materials Solutions segment provides materials-based solutions, such as chemical vapor and atomic layer deposition materials, chemical mechanical planarization ("CMP") slurries and pads, ion implantation specialty gases, formulated etch and clean materials, and other specialty materials that enable customers to achieve better device performance and faster time to yield, while providing for lower total cost of ownership. The Advanced Purity Solutions segment offers filtration, purification and contamination-control solutions that improve customers' yield, device reliability and cost by ensuring the purity of critical liquid chemistries and gases and the cleanliness of wafers and other substrates used throughout semiconductor manufacturing processes, the semiconductor ecosystem and other high-technology industries. The company was founded in 1966 and is headquartered in Billerica, MA.